Performix™ Equipment Front-End Module (EFEM)
EFEM configurable for a wide range of semiconductor substrate processing applications
Description
Performix™ EFEM is an integrated sub-system for a wide range of semiconductor process applications, and had been deployed in the following applications areas Metrology; Dry Wafer Processing; Wet Wafer Processing; Lithography; Wafer Level Packaging. The EFEM is configurable for different wafer sizes as well as different substrate shapes and formats while using the BOLTS interface.
Features
- Unibody frame for simple and sturdy foundation
- Configurable using Kensington full line of MultiLink Robots, Pre-Aligners and FOUP Load Ports
- SEMI Complaint and CE Certified
- BOLTS interface for ADO as well as alternative substrate handling platforms
- Class 1 Cleanliness
Options / Customization
- Flexible configurations tailored to unique tool layouts and fab constraints
- Seamless integration with robots, pre-aligners, and vision systems
- ISO 5 cleanroom-compatible designs built for uptime and consistent throughput
- Optical Character Recognition of wafer ID using high-speed cameras
- Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide
- Cassette presence I/O’s
- FOUP identification through use of RFID adhering to SEMI standards
- Configurable I/O’s
- Customization