Kensingtonlabs

Built for Accuracy. Proven for Uptime. Engineered for Semiconductor Demands.

Kensington Laboratories delivers wafer-handling robots, EFEMs, precision stages, and alignment technologies engineered for unmatched accuracy, reliability, and cleanroom performance. Explore our product families built to integrate seamlessly into your tools and support decades of operation.

Over 30 years of trusted automation for leading semiconductor OEMs.

Robot

High-performance robots engineered for precise, repeatable, and contamination-free wafer transfer. Built with rigid mechanical architecture, advanced encoders, and proven long-term reliability, our robots support 50 mm, 300 mm, and specialty wafers with ease.

Key Advantages:

1)
High placement accuracy with smooth, vibration-stable motion
2)
Supports silicon, thin wafers, warped substrates, glass, quartz, and compound semiconductor materials
3)
Designed for ISO class-1 cleanroom environments with long MTBF and minimal maintenance
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Robot

Equipment Front-End Module (EFEM)

Modular, configurable EFEM platforms that adapt to your existing fab footprint and process flow. From wafer loading to alignment and transfer, our EFEMs provide a stable, ultra-clean interface between the fab environment and your tool.

Key Advantages:

1)
Flexible configurations tailored to unique tool layouts and fab constraints
2)
Seamless integration with robots, pre-aligners, and vision systems
3)
ISO 5 cleanroom-compatible designs built for uptime and consistent throughput
4)
OCR - Optical Character Recognition of water ID using high-speed cameras
5)
Three sizes – 2 FOUP Wide, 3 FOUP Wide and 4 FOUP Wide
6)
Cassette presence I/O’s
7)
FOUP identification through use of RFID adhering to semi standards
8)
Configurable I/O’s
9)
Customization
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Equipment Front-End Module (EFEM)

Stages

Sub-micronssss accuracy linear, rotary, and multi-axis stages engineered for metrology, inspection, lithography, and specialty tools. Our stages deliver smooth, precise, and repeatable motion to support the most demanding semiconductor processes.

Key Advantages:

1)
High stiffness and low vibration for exceptional accuracy
2)
Integrated XYZ-θ configurations supporting complex motion requirements
3)
Durable, long-life design with low maintenance requirements
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Stages

Automatic Door Opener™ (ADO)

Maintain the precision, cleanliness, and reliability of your FOUP load port with expert support services designed to meet today’s demanding fab requirements. Our ADO solutions ensure stable, contamination-free operation while extending the life of your equipment.

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fru

Key Advantages:

1)
FOUP door opener repairs for physically damaged units, restoring performance and functionality
2)
Enhanced controllers and upgraded firmware for improved reliability and long-term serviceability
3)
Refurbishment and recertification to bring upgraded units back to modern fab standards
4)
Low particle contamination
5)
Compatible with FOUP & FOSB
6)
RFID sensor sensing (written as “RFID Sensor Sensing”)
7)
Customizable status lights
8)
High reliability
9)
Wafer mapping
10)
Load ports
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Automatic Door Opener™ (ADO)
Robot EFEMs Stages ADO

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