



High-performance robots engineered for precise, repeatable, and contamination-free wafer transfer. Built with rigid mechanical architecture, advanced encoders, and proven long-term reliability, our robots support 50 mm, 300 mm, and specialty wafers with ease.
Modular, configurable EFEM platforms that adapt to your existing fab footprint and process flow. From wafer loading to alignment and transfer, our EFEMs provide a stable, ultra-clean interface between the fab environment and your tool.
Sub-micronssss accuracy linear, rotary, and multi-axis stages engineered for metrology, inspection, lithography, and specialty tools. Our stages deliver smooth, precise, and repeatable motion to support the most demanding semiconductor processes.
Maintain the precision, cleanliness, and reliability of your FOUP load port with expert support services designed to meet today’s demanding fab requirements. Our ADO solutions ensure stable, contamination-free operation while extending the life of your equipment.

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